SP ACTUATOR
| Function | Enhance the resolution of projection system | |
|---|---|---|
| X4 resolution enhancement | ||
| SPEC | Mass | 79g |
| Mirror Tilt Angle Range | Max. 0.0025 deg. (when max. voltage applied) | |
| State Transition Time | Min. 0.5 msec | |
| Initial Static Tile Angles | ± 0.05 deg. w.r.t. the reference plane | |
| Mirror Height | ± 0.025 mm w.r.t. the reference plane | |
| Driving Voltage | Max. 100V | |
| Current Consumption | < 100mA | |
| Active Area | 22.0 mm X 27.0 mm | |