기능		Enhance the resolution of projection system
		X4 resolution enhancement
SPEC	Mass	79g
	Mirror Tilt Angle Range	Max. 0.0025 deg. (when max. voltage applied)
	State Transition Time	Min. 0.5 msec
	Initial Static Tile Angles	± 0.05 deg. w.r.t. the reference plane
	Mirror Height	± 0.025 mm w.r.t. the reference plane
	Driving Voltage	Max. 100V
	Current Consumption	< 100mA
	Active Area	22.0 mm X 27.0 mm